A fast and high resolution x-ray imaging sensor for tape substrate inspection

Jung-Yeol Yeom; Young-Jun Roh; Chang-Ook Jung; Dae-Hwa Jeong

doi:10.1117/12.807340

17 November 2008 A fast and high resolution x-ray imaging sensor for tape substrate inspection

Jung-Yeol Yeom, Young-Jun Roh, Chang-Ook Jung, Dae-Hwa Jeong

Proceedings Volume 7266, Optomechatronic Technologies 2008; 72660Q (2008) https://doi.org/10.1117/12.807340
Event: International Symposium on Optomechatronic Technologies, 2008, San Diego, California, United States

Abstract

In automated Tape substrate (TS) inspection, machine vision is widely adopted for their high throughput and cost advantages. However, conventional methods are overly sensitive to foreign particles or have limitations in detecting three dimensional defects such as top over-etching. In an attempt to complement vision inspection systems, we proposed utilizing x-ray inspection. To implement x-ray inspection in TS application, we developed a prototype fast and high spatial resolution x-ray imaging sensor which functions at frame rate in excess of 30 fps and has a spatial resolution of 20 µm. In this paper, the development of the sensor and its performance is addressed and the efficiency of the x-ray inspection in detecting top over-etching defects will be shown with experimental studies.

Citation Download Citation

Jung-Yeol Yeom, Young-Jun Roh, Chang-Ook Jung, and Dae-Hwa Jeong "A fast and high resolution x-ray imaging sensor for tape substrate inspection", Proc. SPIE 7266, Optomechatronic Technologies 2008, 72660Q (17 November 2008); https://doi.org/10.1117/12.807340

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