Investigation of repeatability of sol-gel iridium oxide pH sensor on flexible substrate

Wen-Ding Huang; Lun-Chen Hsu; Jianqun Wang; Thermpon Ativanichayaphong; Sanchali Deb; Mu Chiao; J. C. Chiao

doi:10.1117/12.810675

30 December 2008 Investigation of repeatability of sol-gel iridium oxide pH sensor on flexible substrate

Wen-Ding Huang, Lun-Chen Hsu, Jianqun Wang, Thermpon Ativanichayaphong, Sanchali Deb, Mu Chiao, J. C. Chiao

Proceedings Volume 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV; 726916 (2008) https://doi.org/10.1117/12.810675
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2008, Melbourne, Australia

Abstract

In this paper, we presented the fabrication process of miniature pH sensor arrays on flexible polymer substrates. The repeatability of the sensors based on sol-gel fabrication processes was investigated. The sensor repeatability was characterized with linearity, decay time, environmental parameter control and potential stability. Similar linear responses were found in different batches of sensor arrays. Near super- Nernstian responses were measured on each sensor with slope ranges from -71.6 to -110 mV/pH within a pH range between 2 and 12. The response times were compared in different batches. Six to twenty five seconds of average decay time were shown in each sample repeatedly. Three sensors showed the close potential response in different volumes of pH buffer solution. The sensor showed good stability in each step of the titration process between pH values of 1.8 and 11.9. The peak and saturated potential values presented high correlation with pH values with minor noises. The results showed good sensitivity, stability and repeatability using the sol-gel processes for iridium-oxide pH sensors on flexible substrates.

Citation Download Citation

Wen-Ding Huang, Lun-Chen Hsu, Jianqun Wang, Thermpon Ativanichayaphong, Sanchali Deb, Mu Chiao, and J. C. Chiao "Investigation of repeatability of sol-gel iridium oxide pH sensor on flexible substrate", Proc. SPIE 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV, 726916 (30 December 2008); https://doi.org/10.1117/12.810675

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