Coulomb blur advantage of a multi-shaped beam lithography approach

Matthias Slodowski; Hans-Joachim Doering; Thomas Elster; Ines A. Stolberg

doi:10.1117/12.814113

17 March 2009 Coulomb blur advantage of a multi-shaped beam lithography approach

Matthias Slodowski, Hans-Joachim Doering, Thomas Elster, Ines A. Stolberg

Proceedings Volume 7271, Alternative Lithographic Technologies; 72710Q (2009) https://doi.org/10.1117/12.814113
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

This paper describes a new multi beam approach in electron beam lithography called Multi Shaped Beam (MSB). Based on the well known Variable Shaped Beam (VSB) principle, the single shaped beam arrangement is extended and complemented by an array of individually controlled shaped beams. The positive effect of the MSB approach on resolution limiting stochastic beam blur due to Coulomb interactions will be highlighted applying detailed electron-optical Monte-Carlo simulations. To verify the feasibility of the above-mentioned new approach, there is also depicted a proof-of-lithography test stand based on a complete e-beam-lithography system containing MSB-specific hardware and software components.

Citation Download Citation

Matthias Slodowski, Hans-Joachim Doering, Thomas Elster, and Ines A. Stolberg "Coulomb blur advantage of a multi-shaped beam lithography approach", Proc. SPIE 7271, Alternative Lithographic Technologies, 72710Q (17 March 2009); https://doi.org/10.1117/12.814113

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available