SEMATECH's nanoImprint program: a key enabler for nanoimprint introduction

Lloyd C. Litt; Matt Malloy

doi:10.1117/12.814370

18 March 2009 SEMATECH's nanoImprint program: a key enabler for nanoimprint introduction

Lloyd C. Litt, Matt Malloy

Proceedings Volume 7271, Alternative Lithographic Technologies; 72711Q (2009) https://doi.org/10.1117/12.814370
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

SEMATECH has initiated a nanoimprint program and started imaging experiments with a Molecular Imprints Imprio300^TM system at the SEMATECH facility in Albany, NY. An overview of the SEMATECH nanoimprint development program is presented as well as an assessment of nanoimprint technology strengths and weaknesses. SEMATECH plans to explore many of the critical aspects of the nanoimprint process to drive key improvements in overlay, imprint mask cleaning, and defectivity toward making nanoimprint technology a cost-effective lithography strategy for CMOS development and manufacturing applications. Results of nanoimprint overlay with a previous level exposed on a 1.35NA immersion lithography scanner show it has noticeably improved over previous results with champion data in the 18nm range. Imprint mask cleaning on an automated tool has shown no measurable degradation of critical dimension or line width roughness after ten cleaning cycles.

Citation Download Citation

Lloyd C. Litt and Matt Malloy "SEMATECH's nanoImprint program: a key enabler for nanoimprint introduction", Proc. SPIE 7271, Alternative Lithographic Technologies, 72711Q (18 March 2009); https://doi.org/10.1117/12.814370

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available