An investigation of perfluoroalkylamine contamination control

Andrew J. Dallas; Dustin Zastera

doi:10.1117/12.814851

23 March 2009 An investigation of perfluoroalkylamine contamination control

Andrew J. Dallas, Dustin Zastera

Proceedings Volume 7272, Metrology, Inspection, and Process Control for Microlithography XXIII; 727220 (2009) https://doi.org/10.1117/12.814851
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

Perfluoroalkylamine (PFAA) contamination has been observed to be a growing contamination issue in semiconductor fabs due to the increased tolerances demanded by next generation lithography processes. These contaminants are found within the cleanroom, process environments and within various tools and enclosures. As a result, effective control of PFAAs in lithographic processing and other critical environments are becoming an important filtration problem. This work was undertaken to evaluate filter performance for the removal of PFAAs and to provide an optimal filtration solution. The filter breakthrough performance of perfluorotributylamine (PFTBA), a common heat transfer fluid, is investigated over a range of environmental conditions for several commercially available adsorbent materials. The results from these accelerated tests indicate that PFAAs can be effectively removed with activated carbon-based chemical filters.

Citation Download Citation

Andrew J. Dallas and Dustin Zastera "An investigation of perfluoroalkylamine contamination control", Proc. SPIE 7272, Metrology, Inspection, and Process Control for Microlithography XXIII, 727220 (23 March 2009); https://doi.org/10.1117/12.814851

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available