Improve scanner matching using automated real-time feedback control via scanner match maker (SMM)

Shian-Huan (Cooper) Chiu; Sheng-Hsiung Yu; Min-Hin Tung; Lei-Ken Wu; Ya-Tsz Yeh; James Manka; Chao-Tien (Healthy) Huang; John Robinson; Chin-Chou (Kevin) Huang; David Tien; YuYu Chen; Katsushi Makino; Jium-Ming Lin

doi:10.1117/12.814186

23 March 2009 Improve scanner matching using automated real-time feedback control via scanner match maker (SMM)

Shian-Huan (Cooper) Chiu, Sheng-Hsiung Yu, Min-Hin Tung, Lei-Ken Wu, Ya-Tsz Yeh, James Manka, Chao-Tien (Healthy) Huang, John Robinson, Chin-Chou (Kevin) Huang, David Tien, YuYu Chen, Katsushi Makino, Jium-Ming Lin

Author Affiliations +

Proceedings Volume 7272, Metrology, Inspection, and Process Control for Microlithography XXIII; 72723E (2009) https://doi.org/10.1117/12.814186
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

Traditional "matching matrix" methods for characterizing scanner matching assume that the scanner distortion performance is static. The latest scanner models can adjust the distortion performance dynamically, at run-time. The Scanner Match Maker (SMM) system facilitates calculation and application of these run-time adjustments, improving effective overlay performance of the scanner fleet, allowing more flexibility for mix-and-match exposure. The overlay |mean|+3s performance was improved significantly for a layer pair that is currently allowed mix-and-match pairing.

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Shian-Huan (Cooper) Chiu, Sheng-Hsiung Yu, Min-Hin Tung, Lei-Ken Wu, Ya-Tsz Yeh, James Manka, Chao-Tien (Healthy) Huang, John Robinson, Chin-Chou (Kevin) Huang, David Tien, YuYu Chen, Katsushi Makino, and Jium-Ming Lin "Improve scanner matching using automated real-time feedback control via scanner match maker (SMM)", Proc. SPIE 7272, Metrology, Inspection, and Process Control for Microlithography XXIII, 72723E (23 March 2009); https://doi.org/10.1117/12.814186

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