Enabling process window improvement at 45nm and 32nm with free-form DOE illumination

Tamer H. Coskun; Apo Sezginer; Vishnu Kamat; Michiel Kruger; Bayram Yenikaya; James Carriere; Jared Stack; Marc Himel

doi:10.1117/12.814215

16 March 2009 Enabling process window improvement at 45nm and 32nm with free-form DOE illumination

Tamer H. Coskun, Apo Sezginer, Vishnu Kamat, Michiel Kruger, Bayram Yenikaya, James Carriere, Jared Stack, Marc Himel

Proceedings Volume 7274, Optical Microlithography XXII; 72740B (2009) https://doi.org/10.1117/12.814215
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

We present a method for optimizing a free-form illuminator implemented using a diffractive optical element (DOE). The method, which co-optimizes the source and mask taking entire images of circuit clips into account, improves the common process-window and 2-D image fidelity. We compare process-windows for optimized standard and free-form DOE illuminations for arrays and random placements of contact holes at the 45 nm and 32 nm nodes. Source-mask cooptimization leads to a better-performing source compared to source-only optimization. We quantify the effect of typical DOE manufacturing defects on lithography performance in terms of NILS and common process-window.

Citation Download Citation

Tamer H. Coskun, Apo Sezginer, Vishnu Kamat, Michiel Kruger, Bayram Yenikaya, James Carriere, Jared Stack, and Marc Himel "Enabling process window improvement at 45nm and 32nm with free-form DOE illumination", Proc. SPIE 7274, Optical Microlithography XXII, 72740B (16 March 2009); https://doi.org/10.1117/12.814215

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available