32nm node device laser-bandwidth OPE sensitivity and process matching

Kazuyuki Yoshimochi; Takao Tamura; Takaaki Kuribayashi; Takayuki Uchiyama; Nigel Farrar; Toshihiro Oga; James Bonafede

doi:10.1117/12.813987

16 March 2009 32nm node device laser-bandwidth OPE sensitivity and process matching

Kazuyuki Yoshimochi, Takao Tamura, Takaaki Kuribayashi, Takayuki Uchiyama, Nigel Farrar, Toshihiro Oga, James Bonafede

Proceedings Volume 7274, Optical Microlithography XXII; 72742Q (2009) https://doi.org/10.1117/12.813987
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

For 32 nm Node Logic Device, we studied the effect of laser bandwidth variation on Optical Proximity Effect (OPE) by investigating through-pitch critical dimension (CD) performance. Our investigation evaluated CD performance with and without the application of Sub-resolution Assist Features (SRAF). These results enabled us to determine the Iso-Dense Bias (IDB), and sensitivity to laser bandwidth, for both SRAF and no-SRAF cases, as well as the impact on Process Window. From the IDB results we present the required laser bandwidth stability in order to maintain OPE variation within CD Budget tolerances. We also introduce OPE matching results between different generation Immersion Lithography exposure tools evaluated for 45nm Node Logic Device.

Citation Download Citation

Kazuyuki Yoshimochi, Takao Tamura, Takaaki Kuribayashi, Takayuki Uchiyama, Nigel Farrar, Toshihiro Oga, and James Bonafede "32nm node device laser-bandwidth OPE sensitivity and process matching", Proc. SPIE 7274, Optical Microlithography XXII, 72742Q (16 March 2009); https://doi.org/10.1117/12.813987

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available