Design specific variation in pattern transfer by via/contact etch process: full-chip analysis

Valeriy Sukharev; Ara Markosian; Armen Kteyan; Levon Manukyan; Nikolay Khachatryan; Jun-Ho Choy; Hasmik Lazaryan; Henrik Hovsepyan; Seiji Onoue; Takuo Kikuchi; Tetsuya Kamigaki

doi:10.1117/12.813882

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12 March 2009 Design specific variation in pattern transfer by via/contact etch process: full-chip analysis

Valeriy Sukharev, Ara Markosian, Armen Kteyan, Levon Manukyan, Nikolay Khachatryan, Jun-Ho Choy, Hasmik Lazaryan, Henrik Hovsepyan, Seiji Onoue, Takuo Kikuchi, Tetsuya Kamigaki

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Proceedings Volume 7275, Design for Manufacturability through Design-Process Integration III; 72750H (2009) https://doi.org/10.1117/12.813882
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

A novel model-based algorithm provides a capability to control full-chip design specific variation in pattern transfer caused by via/contact etch processes. This physics based algorithm is capable of detecting and reporting etch hotspots based on the fab defined thresholds of acceptable variations in critical dimension (CD) of etched shapes. It can be used also as a tool for etch process optimization to capture the impact of a variety of patterns presented in a particular design. A realistic set of process parameters employed by the developed model allows using this novel via-contact etch (VCE) EDA tool for the design aware process optimization in addition to the "standard" process aware design optimization.

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Valeriy Sukharev, Ara Markosian, Armen Kteyan, Levon Manukyan, Nikolay Khachatryan, Jun-Ho Choy, Hasmik Lazaryan, Henrik Hovsepyan, Seiji Onoue, Takuo Kikuchi, and Tetsuya Kamigaki "Design specific variation in pattern transfer by via/contact etch process: full-chip analysis", Proc. SPIE 7275, Design for Manufacturability through Design-Process Integration III, 72750H (12 March 2009); https://doi.org/10.1117/12.813882

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