High quality AlN films grown by pulsed atomic-layer epitaxy

Hu Wang; Ruofei Xiang; Qiang Zhang; Jiangnan Dai; Qinghua He; Zhihao Wu; Changqing Chen

doi:10.1117/12.823268

19 February 2009 High quality AlN films grown by pulsed atomic-layer epitaxy

Hu Wang, Ruofei Xiang, Qiang Zhang, Jiangnan Dai, Qinghua He, Zhihao Wu, Changqing Chen

Proceedings Volume 7279, Photonics and Optoelectronics Meetings (POEM) 2008: Optoelectronic Devices and Integration; 72791J (2009) https://doi.org/10.1117/12.823268
Event: Photonics and Optoelectronics Meetings, 2008, Wuhan, China

Abstract

In this paper, we report growth of AlN epilayers by pulsed atomic-layer epitaxy (PALE) method, by which the group III element sources and NH3 were alternatively transported into the reactor. We have systematically investigated the effects of growth conditions of PALE on the crystal quality of AlN epilayers. By optimizing the PALE growth conditions, the root mean square (rms) of AlN layers was 1.319 nm and the full width at half-maximum (FWHM) was 0.18 arcmin, room-temperature band edge absorbing peak at 198 nm was easily achieved, indicating the small mosaicity and low dislocation density of the films.

Citation Download Citation

Hu Wang, Ruofei Xiang, Qiang Zhang, Jiangnan Dai, Qinghua He, Zhihao Wu, and Changqing Chen "High quality AlN films grown by pulsed atomic-layer epitaxy", Proc. SPIE 7279, Photonics and Optoelectronics Meetings (POEM) 2008: Optoelectronic Devices and Integration, 72791J (19 February 2009); https://doi.org/10.1117/12.823268

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available