Fabrication of microglass lens mould by using ultraprecision microgrinding process

Shaohui Yin; Kun Tang; Yongjian Zhu; Fengjun Chen; Yufeng Fan; Li Guo

doi:10.1117/12.830785

20 May 2009 Fabrication of microglass lens mould by using ultraprecision microgrinding process

Shaohui Yin, Kun Tang, Yongjian Zhu, Fengjun Chen, Yufeng Fan, Li Guo

Proceedings Volume 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 728206 (2009) https://doi.org/10.1117/12.830785
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

With the rapid development of information technology and electro-optical communication industry, various micro optical lenses have been used widely. Especially, because of great advantages concerning life, stability and imaging characteristics, the demand for glass lens is increasing the high-precision imaging. This paper studies on the ultra-precision parallel grinding technique of micro glass lens mould and investigates the form error compensation technique in grinding process. Grinding test of micro-lens mould with 10mm in diameter is conducted, and the surface roughness of R_a 5.98nm, Rz 34.95nm and form accuracy of PV 113nm, RMS 23nm are obtained.

Citation Download Citation

Shaohui Yin, Kun Tang, Yongjian Zhu, Fengjun Chen, Yufeng Fan, and Li Guo "Fabrication of microglass lens mould by using ultraprecision microgrinding process", Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 728206 (20 May 2009); https://doi.org/10.1117/12.830785

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