Material removal rate based on edge effects in ultraprecision polishing process

Wei Yang; YinBiao Guo; Qiao Xu

doi:10.1117/12.830791

20 May 2009 Material removal rate based on edge effects in ultraprecision polishing process

Wei Yang, YinBiao Guo, Qiao Xu

Proceedings Volume 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 72820A (2009) https://doi.org/10.1117/12.830791
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

Based on the edge effects in the ultra precision polishing process, a revised skin model is used to predict material removal rate (MRR) of circular wafer. With force equation and torque equation, in order to calculate the skin width and the pressure distribution, a revised formula is given. According to Preston's equation, by using Math-Cad software, the material removal rate (MRR) of circular wafer is simulated, and two factors which influence MRR are discussed.One is the distance between the circular wafer center and the polishing tool center; the other is the ratio of the angular velocity of circular wafer to the polishing tool angular velocity.

Citation Download Citation

Wei Yang, YinBiao Guo, and Qiao Xu "Material removal rate based on edge effects in ultraprecision polishing process", Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72820A (20 May 2009); https://doi.org/10.1117/12.830791

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available