Effects of velocity and pressure distributions on material removal rate in polishing process

Yaguo Li; Jian Wang; Qaio Xu; Wei Yang; Yinbiao Guo

doi:10.1117/12.830798

20 May 2009 Effects of velocity and pressure distributions on material removal rate in polishing process

Yaguo Li, Jian Wang, Qaio Xu, Wei Yang, Yinbiao Guo

Proceedings Volume 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 72820G (2009) https://doi.org/10.1117/12.830798
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

The distributions of velocity and pressure during polishing process are analyzed in this paper and the effects of which on material removed/removal rate (MR/MRR) are discussed. Usually, polished wafer moves in planetary kinematics pattern, and when the rotation rate of wafer is identical with that of polishing pad the velocity distribution is theoretically uniform from the viewpoint of wafer-pad interface as a whole. On the other hand, when a load is applied to the top surface of wafer pressure distribution is even in the interior of wafer while the pressure sharply increases at the wafer's border, which will inevitably affect the non-uniformity (NU) of MR/MRR, and therefore we have to adjust other parameters, such as rotation rate of pad (or wafer) or improve motion pattern of wafer with respect to polishing pad, to optimize the NU.

Citation Download Citation

Yaguo Li, Jian Wang, Qaio Xu, Wei Yang, and Yinbiao Guo "Effects of velocity and pressure distributions on material removal rate in polishing process", Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72820G (20 May 2009); https://doi.org/10.1117/12.830798

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available