Fast tool servo system for online compensation of error motion on an ultraprecision lathe

Xiaohui Wang; Tao Sun

doi:10.1117/12.830820

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20 May 2009 Fast tool servo system for online compensation of error motion on an ultraprecision lathe

Xiaohui Wang, Tao Sun

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Proceedings Volume 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 728211 (2009) https://doi.org/10.1117/12.830820
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

In order to obtain high accuracy and a fine surface finish of large area workpiece, position control of machine tool has become the main concern to achieve high precision position control. In this system, diamond turning with a fast tool servo (FTS) driven by a piezoelectric actuator along with a capacitive displacement sensor was chosen as the fabrication method. A laser interferometer is implemented to measure the straightness error of the translational slide accurately. The detected error signals are compensated by the FTS during the cutting process. To achieve better tracking performance, proportional integral (PI) feed back control with a feed-forward predictor is implemented. Experimental results show that the FTS can effectively and successfully compensate the straightness errors of the X-axis translational slide of the miniature ultra-precision lathe.

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Xiaohui Wang and Tao Sun "Fast tool servo system for online compensation of error motion on an ultraprecision lathe", Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 728211 (20 May 2009); https://doi.org/10.1117/12.830820

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