Non-null interferometric system for general aspheric test

Dong Liu; Yongying Yang; Chao Tian; Lin Wang; Yongmo Zhuo

doi:10.1117/12.828283

20 May 2009 Non-null interferometric system for general aspheric test

Dong Liu, Yongying Yang, Chao Tian, Lin Wang, Yongmo Zhuo

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 728305 (2009) https://doi.org/10.1117/12.828283
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

Aspheric design and fabrication have obtained great achievements with the fast developments of modern science and technology, especially computer science, while the test of aspherics has become a chief limitation of aspheric applications. Due to the arbitrary nature of aspherics, test of all aspherics with only one instrument seems impossible. This paper presents a non-null interferometric system that can be applied for general aspheric test. The systematic error of non-null aspheric test system is studied, according to which an error separating and correcting method is proposed then. Computer simulation shows the error correcting method can correct the systematic error of non-null aspheric test system effectively and efficiently. Experiments have been carried out with the proposed interferometric non-null aspheric test system and the results show the system can greatly increase the accuracy of the non-null aspheric test.

Citation Download Citation

Dong Liu, Yongying Yang, Chao Tian, Lin Wang, and Yongmo Zhuo "Non-null interferometric system for general aspheric test", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 728305 (20 May 2009); https://doi.org/10.1117/12.828283

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