Large dynamic range optical metrology with radial shearing interferometry

Dahai Li; Xiaoping Qi; Yiping Cao; Xin Zhou; Qionghua Wang

doi:10.1117/12.828599

20 May 2009 Large dynamic range optical metrology with radial shearing interferometry

Dahai Li, Xiaoping Qi, Yiping Cao, Xin Zhou, Qionghua Wang

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 72830G (2009) https://doi.org/10.1117/12.828599
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

Optical metrology for elements with large dynamic range is very important, especially in aspheric components testing field. Cyclic radial shearing interferometer(CRSI) with a small radial shearing ratio of the expanded wavefront's radii to the contracted version's radii can obtain a small magnitude optical path difference(OPD) because the expanded wavefront and its contracted version nearly have the same shape and magnitude, especially for an optical component to be tested with rotationally symmetric surface. The number of fringe pattern can be decreased dramatically and recorded by CCD. This paper demonstrates the feasibility that CRSI could be used to measure an aspheric surface with large dynamic range and large aperture.

Citation Download Citation

Dahai Li, Xiaoping Qi, Yiping Cao, Xin Zhou, and Qionghua Wang "Large dynamic range optical metrology with radial shearing interferometry", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72830G (20 May 2009); https://doi.org/10.1117/12.828599

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