Determination of optical constants in the VUV range for fluoride thin films

Chunrong Xue; Kui Yi; Chaoyang Wei; Jianda Shao; Zhengxiu Fan

doi:10.1117/12.828661

20 May 2009 Determination of optical constants in the VUV range for fluoride thin films

Chunrong Xue, Kui Yi, Chaoyang Wei, Jianda Shao, Zhengxiu Fan

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 72831E (2009) https://doi.org/10.1117/12.828661
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

Laser applications in semiconductor industry, metrology and medical applications call for improvement and reliable optical coatings in the short wavelength range. Especially, optical coatings for ArF and F₂ laser systems are important for micromachining and lithography applications. For designing and manufacturing multilayer, a good knowledge of refractive indices and absorption coefficients of the coating materials is essential. The intrinsic absorption of fluoride coating materials tends to higher values in the DUV/VUV spectral range, the reliable determination of absorption losses by photometric techniques has to overcome various obstacles caused by light absorption in air, scattering effects of the coating, and absorption related to contamination of the employed fluoride material. In this paper, high-refractive-index materials such as LaF₃, NdF₃, and GdF₃ and low-refractive-index materials such as MgF₂, AlF₃, and Na₃AlF₆ single thin films are deposited by a resistive-heating boat at different deposited rates and specific substrate temperatures on single crystal MgF₂ substrates. Transmittances of all fluoride thin films are measured through business spectrometer in the ambient atmosphere and measured under vacuum through Synchrotron radiation in the wavelength region from 120nm to 500nm. The optical constants of these materials are determined from Envelope method and iterative algorithm with transmittance measurements. All this work play an important role in the design and manufacturing of cost-effective, mechanically and optically stable optical coatings for VUV region.

Citation Download Citation

Chunrong Xue, Kui Yi, Chaoyang Wei, Jianda Shao, and Zhengxiu Fan "Determination of optical constants in the VUV range for fluoride thin films", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72831E (20 May 2009); https://doi.org/10.1117/12.828661

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