Accuracy and error analysis of real-time surface profile measurement with sinusoidal phase modulation interferometer

Guotian He; Helun Jiang; Rongchang Liao

doi:10.1117/12.828674

20 May 2009 Accuracy and error analysis of real-time surface profile measurement with sinusoidal phase modulation interferometer

Guotian He, Helun Jiang, Rongchang Liao

Author Affiliations +

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 72831N (2009) https://doi.org/10.1117/12.828674
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

Sinusoidal-phase modulation interferometer is a new type of optical precision measuring instrument with nanometer accuracy real-time surface profile measurement. This paper based on real-time surface profile measurement of sinusoidal-phase modulation interferometry, researched filter theory and phase-interference in real-time measurement systems, its phase error is analyzed, and it discusses the theory of error types and causes of error, error estimation and derived measurement formula. Experiment proves the correctness of theory and application of research findings in the works in a certain significance.

Citation Download Citation

Guotian He, Helun Jiang, and Rongchang Liao "Accuracy and error analysis of real-time surface profile measurement with sinusoidal phase modulation interferometer", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72831N (20 May 2009); https://doi.org/10.1117/12.828674

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