Study on optimization of parameter selection in Fourier transform profilometry

Jin Peng; Li Wang; Xiaorong Gao; Zeyong Wang; Quanke Zhao

doi:10.1117/12.828687

20 May 2009 Study on optimization of parameter selection in Fourier transform profilometry

Jin Peng, Li Wang, Xiaorong Gao, Zeyong Wang, Quanke Zhao

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 72831W (2009) https://doi.org/10.1117/12.828687
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

For using grating projection principle 3D profile measurement, the key is to select the appropriate parameters, assurance system measurement precision and scope, and to ensure Fourier spectrum completely separated. This paper focuses on the use of the concept of equivalent wavelength; parameters selection and optimization in Fourier transform profilometry (FTP). The experiments shows that : Compression angle, raise projection grating spatial frequency can be avoided in the frequency domain of spectrum aliasing, and to ensure the accuracy of the measurement system. Through the angle and frequency parameters of selection and optimization, the best results are achieved.

Citation Download Citation

Jin Peng, Li Wang, Xiaorong Gao, Zeyong Wang, and Quanke Zhao "Study on optimization of parameter selection in Fourier transform profilometry", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72831W (20 May 2009); https://doi.org/10.1117/12.828687

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