MEMS testing and applications in automotive and aerospace industries

Zhichun Ma; Xuyuan Chen

doi:10.1117/12.832067

18 May 2009 MEMS testing and applications in automotive and aerospace industries

Zhichun Ma, Xuyuan Chen

Proceedings Volume 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 728409 (2009) https://doi.org/10.1117/12.832067
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

MEMS technology combines micromachining and integrated circuit fabrication technologies to produce highly reliable MEMS transducers. This paper presents an overview of MEMS transducers applications, particularly in automotive and aerospace industries, which includes inertia sensors for safety, navigation, and guidance control, thermal anemometer for temperature and heat-flux sensors in engine applications, MEMS atomizers for fuel injection, and micromachined actuators for flow control applications. Design examples for the devices in above mentioned applications are also presented and test results are given.

Citation Download Citation

Zhichun Ma and Xuyuan Chen "MEMS testing and applications in automotive and aerospace industries", Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 728409 (18 May 2009); https://doi.org/10.1117/12.832067

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