Simulation on a deformable mirror actuated by microfluidic elements

Chao Deng; Hao Wang; Wenzhen Sun

doi:10.1117/12.832075

18 May 2009 Simulation on a deformable mirror actuated by microfluidic elements

Chao Deng, Hao Wang, Wenzhen Sun

Proceedings Volume 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 72840H (2009) https://doi.org/10.1117/12.832075
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

Some primary simulation results on a deformable mirror actuated by microfluidic elements are introduced. Thickness of the membrane is determined firstly by the inner pressure of liquid element. The shape change of membrane with single droplet is analyzed. In a deformable mirror model that includes 91 liquid actuation units, the calculation result of several key points shows the mirror deformation capability. Some unfavorable phenomena in the simulation, such as the fragmentation and local outspread of liquid element, are also introduced because they are helpful for further design.

Citation Download Citation

Chao Deng, Hao Wang, and Wenzhen Sun "Simulation on a deformable mirror actuated by microfluidic elements", Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 72840H (18 May 2009); https://doi.org/10.1117/12.832075

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