Design and optimization of 2D electrostatic micro scanning mirrors

Wenying Ma; Fangrong Hu; Dongmei Cai; Dajia Wang; Chuankai Qiu; Jun Yao

doi:10.1117/12.832080

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18 May 2009 Design and optimization of 2D electrostatic micro scanning mirrors

Wenying Ma, Fangrong Hu, Dongmei Cai, Dajia Wang, Chuankai Qiu, Jun Yao

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Proceedings Volume 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 72840L (2009) https://doi.org/10.1117/12.832080
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

is paper demonstrates a 2D (two-dimensional) electrostatic MEMS scanning mirror. This scanner rotates on both axis X and Y, giving a two degrees of freedom. Finite element analysis has shown that optical scanning angle on axis X is 5.0° at 120V and axis Y is 4.4°at 160V. The structure has been optimized to achieve good dynamic performance.

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Wenying Ma, Fangrong Hu, Dongmei Cai, Dajia Wang, Chuankai Qiu, and Jun Yao "Design and optimization of 2D electrostatic micro scanning mirrors", Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 72840L (18 May 2009); https://doi.org/10.1117/12.832080

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