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18 May 2009 Design and optimization of 2D electrostatic micro scanning mirrors
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Abstract
is paper demonstrates a 2D (two-dimensional) electrostatic MEMS scanning mirror. This scanner rotates on both axis X and Y, giving a two degrees of freedom. Finite element analysis has shown that optical scanning angle on axis X is 5.0° at 120V and axis Y is 4.4°at 160V. The structure has been optimized to achieve good dynamic performance.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wenying Ma, Fangrong Hu, Dongmei Cai, Dajia Wang, Chuankai Qiu, and Jun Yao "Design and optimization of 2D electrostatic micro scanning mirrors", Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 72840L (18 May 2009); https://doi.org/10.1117/12.832080
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