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18 May 2009 Fabrication of flexible grating sensing waveguide based on nano-imprint lithography and micro-replication process
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Abstract
Soft and flexible grating sensing waveguides is urgently demanded in application of micro-bending sensing and surface distortion sensing in medical catheter and smart skin sensing unit etc. Based on Nano-imprint Lithography and micro-replication process, polymer grating waveguides with core size 4μm×20μm and pitch 0.75μm are fabricated successfully in this paper. This novel grating waveguides is soft and flexible enough for related application and with the bio-medical safe feature when used in human body catheter. Fabricated processes are presented including the fabrication of micro mould and UV-replication process, and relative skills are discussed also in this paper.
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Yueming Liu, Weijian Tian, and Shaojun Zhang "Fabrication of flexible grating sensing waveguide based on nano-imprint lithography and micro-replication process", Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 728413 (18 May 2009); https://doi.org/10.1117/12.832098
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