Bio/chemical sensors heterogeneously integrated with Si-CMOS circuitry

Frances Williams; Moriba George; Ozgul Yasar; Demetris Geddis; Zhili Hao

doi:10.1117/12.817872

31 March 2009 Bio/chemical sensors heterogeneously integrated with Si-CMOS circuitry

Frances Williams, Moriba George, Ozgul Yasar, Demetris Geddis, Zhili Hao

Proceedings Volume 7291, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009; 72910N (2009) https://doi.org/10.1117/12.817872
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2009, San Diego, California, United States

Abstract

Sensor arrays for bio/chemical sensing generally incorporate different types of sensors with different substrate coatings, enabling increased sensor sensitivity and selectivity. However, a challenge in using multiple sensor systems is integration with RF electronic circuitry. This work presents the development of flexural plate wave (FPW) acoustic devices implemented in a sensor array and co-integrated on a Si-CMOS circuit. FPWs are highly sensitive to surface perturbations and indirectly sense analytes by detecting mass changes on the sensing plate surface. The sensors are placed in an oscillating circuit, where changes in the oscillation frequency are used to determine changes in the wave velocity due to mass loading by the analyte [1, 2]. Since FPWs are generated in thin plates, these devices are highly sensitive to loading and exhibit the highest mass sensitivities of any acoustic wave device [1, 2]. In the work presented, FPWs are fabricated on Si/SiO₂/Si native substrates, with the interdigitated transducers (IDTs) isolated from the active sensing surface. This innovative design enables the sensors to be fabricated and then separated from the native substrate, transferred, and bonded to the host Si-CMOS circuit. Thus, a new approach for the heterogeneous integration of FPW sensors and circuitry is provided. Following integration, the FPWs can be customized with either chemical membranes or biological functionalization. Moreover, this novel approach allows each sensor to be optimized independently before being connected to the host substrate. This paper presents the design, development, and integration process of an FPW sensor on Si-CMOS circuitry.

Citation Download Citation

Frances Williams, Moriba George, Ozgul Yasar, Demetris Geddis, and Zhili Hao "Bio/chemical sensors heterogeneously integrated with Si-CMOS circuitry", Proc. SPIE 7291, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009, 72910N (31 March 2009); https://doi.org/10.1117/12.817872

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