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7 January 2009 Recent developments in surface acoustic wave sensors
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Proceedings Volume 7297, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies IV; 72972G (2009) https://doi.org/10.1117/12.823700
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies IV, 2008, Constanta, Romania
Abstract
Surface Acoustic Wave sensors - SAW have been recognized for their efficiency and versatility in the electrical signals processing. The majority of results reported till the present, regarding SAW sensors, have been used Rayleigh SAW, on the principle of delay line. Reflexive delay line can be used for passive sensing and remote control. In the paper is presented a short introduction regarding the actual level of SAW devices development and their applications. A comparative study in connection with diversity of piezoelectric materials used for SAW devices manufacturing, (Quartz, LiNbO3, LGS with emphasis on GaPO4) evidence the advantages of GaPO4. The development directions of SAW sensor devices are shown: telecommunication, RFID SAW systems, SAW devices for remote monitoring, SAW sensors for early cancer diagnostics. Some applications of SAW sensor devices with GAPO4 are presented in the directions: remote monitoring and identification of gas. Some conclusions regarding trends in the development of SAW sensor devices are presented in the end of the work.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul Schiopu, Ionica Cristea, Neculai Grosu, and Alexandru Craciun "Recent developments in surface acoustic wave sensors", Proc. SPIE 7297, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies IV, 72972G (7 January 2009); https://doi.org/10.1117/12.823700
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