Parylene-based uncooled thermomechanical array

Onur Ferhanoglu; M. Fatih Toy; Hakan Urey

doi:10.1117/12.818951

6 May 2009 Parylene-based uncooled thermomechanical array

Onur Ferhanoglu, M. Fatih Toy, Hakan Urey

Proceedings Volume 7298, Infrared Technology and Applications XXXV; 72980H (2009) https://doi.org/10.1117/12.818951
Event: SPIE Defense, Security, and Sensing, 2009, Orlando, Florida, United States

Abstract

Novel thermo-mechanical detector arrays with integrated diffraction grating for optical readout were designed and fabricated. Parylene was used as the structural material due to its high thermal isolation and mismatch properties. Calculations reveal that the NETD performance of a thermo-mechanical array using Parylene can be significantly better than SiNx based designs and offer a theoretical NETD value <10mK assuming an optical readout with a high dynamic range detector array. Finite Element simulations were performed with length of the bimaterial leg as the optimization parameter. It was observed that only a few microns of isolation leg supported 30 fps applications, leaving rest of the leg to be bimaterial and providing large thermo-mechanical deflections.

Citation Download Citation

Onur Ferhanoglu, M. Fatih Toy, and Hakan Urey "Parylene-based uncooled thermomechanical array", Proc. SPIE 7298, Infrared Technology and Applications XXXV, 72980H (6 May 2009); https://doi.org/10.1117/12.818951

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