Paper
6 May 2009 Wavelength-selective infrared detectors based on cross patterned resistive sheets
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Abstract
The use of a cross-shaped patterned resistive sheet as an infrared-selective absorber, including the effects of a SiNx mechanical support dielectric layer is discussed. These cross patterned resistive sheets are a modified form of classical Salisbury Screens that utilize a resistive absorber layer placed a quarter-wavelength in front of a mirror. In comparison with previously designed patterned resistive sheets that have only a single resistive layer with rectangular patterned holes, here we consider a resistive absorber layer and a support dielectric layer with cross patterned holes through both the resistive absorption layer and the support layer.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Joo-Yun Jung, Jong Yeon Park, and Dean P. Neikirk "Wavelength-selective infrared detectors based on cross patterned resistive sheets", Proc. SPIE 7298, Infrared Technology and Applications XXXV, 72980L (6 May 2009); https://doi.org/10.1117/12.818638
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Dielectrics

Absorption

Dielectric polarization

Long wavelength infrared

Microbolometers

Resistance

Infrared detectors

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