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28 April 2009 Diffractive MEMS components, systems, and applications
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Abstract
A MEMS (micro electro mechanical system) technology has been used to produce scanning grating chips which have a tiltable plate with grating structures optimized for the 900nm ... 2500nm range as diffractive element. Based on these chips different spectrometers and a hyper spectral imager have been realized for NIR-spectroscopic applications like agricultural quality analysis, recycling and process control. Ongoing developments aim at the further reduction of size and effort. Chip scale or wafer scale packaging technologies could help to shrink the complete spectroscopic system. The integration of signal processing and evaluation routines opens new applications for a broad range of scientific and nonscientific users.
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Heinrich Grüger, Thomas Egloff, Tino Pügner, Michael Scholles, Harald Schenk, and Hubert Lakner "Diffractive MEMS components, systems, and applications", Proc. SPIE 7319, Next-Generation Spectroscopic Technologies II, 73190G (28 April 2009); https://doi.org/10.1117/12.818465
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