Improved MOEMS-based ultra-rapid Fourier transform infrared spectrometer

A. Tortschanoff; A. Kenda; M. Kraft; T. Sandner; H. Schenk; W. Scherf

doi:10.1117/12.818646

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28 April 2009 Improved MOEMS-based ultra-rapid Fourier transform infrared spectrometer

A. Tortschanoff, A. Kenda, M. Kraft, T. Sandner, H. Schenk, W. Scherf

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Proceedings Volume 7319, Next-Generation Spectroscopic Technologies II; 73190I (2009) https://doi.org/10.1117/12.818646
Event: SPIE Defense, Security, and Sensing, 2009, Orlando, Florida, United States

Abstract

We present an improved FTIR spectrometer using a novel MOEMS actuator and discuss in detail the properties of the MOEMS component and the resulting FT-IR sensor device. Spectral resolution and the spectral range allow making use of the inherent multi-analyte detection capabilities giving the spectroscopy platform an advantage over singlewavelength IR sensors. With its further miniaturization potential due to its MOEMS core, this compact, energy efficient and robust spectrometer can thus act as transducer for portable and ultra-lightweight spectroscopic IR sensors, e.g. all purpose hazardous vapor sensors, sensors for spaceborne and Micro-UAV based IR analysis, and many more.

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A. Tortschanoff, A. Kenda, M. Kraft, T. Sandner, H. Schenk, and W. Scherf "Improved MOEMS-based ultra-rapid Fourier transform infrared spectrometer", Proc. SPIE 7319, Next-Generation Spectroscopic Technologies II, 73190I (28 April 2009); https://doi.org/10.1117/12.818646

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