Paper
29 April 2009 High single photon detection efficiency 4H-SiC avalanche photodiodes
Xiaogang Bai, Dion McIntosh, Han-Din Liu, Joe C. Campbell
Author Affiliations +
Abstract
Detection of low-level ultraviolet (UV) light has been the focus of numerous research and development efforts in recent years. To date, the most promising solid-state solution is SiC avalanche photodiodes. We report 4H-SiC avalanche photodiodes with low dark current and high gain. Geiger mode operation with high single photon detection efficiency and low dark count probability has been achieved. The dark current behavior of a 4x4 array of SiC APDs is also presented.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xiaogang Bai, Dion McIntosh, Han-Din Liu, and Joe C. Campbell "High single photon detection efficiency 4H-SiC avalanche photodiodes", Proc. SPIE 7320, Advanced Photon Counting Techniques III, 73200I (29 April 2009); https://doi.org/10.1117/12.818122
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Cited by 4 scholarly publications.
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KEYWORDS
Avalanche photodetectors

Silicon carbide

Single photon

Ultraviolet radiation

Avalanche photodiodes

Silicon

Etching

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