Development of high-resolution and light-weight x-ray optics with deformed silicon wafers

Yuichiro Ezoe; Takayuki Shirata; Takaya Ohashi; Manabu Ishida; Kazuhisa Mitsuda; Kozo Fujiwara; Kohei Morishita; Kazuo Nakajima

doi:10.1117/12.823932

30 April 2009 Development of high-resolution and light-weight x-ray optics with deformed silicon wafers

Yuichiro Ezoe, Takayuki Shirata, Takaya Ohashi, Manabu Ishida, Kazuhisa Mitsuda, Kozo Fujiwara, Kohei Morishita, Kazuo Nakajima

Author Affiliations +

Proceedings Volume 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space; 73600B (2009) https://doi.org/10.1117/12.823932
Event: SPIE Optics + Optoelectronics, 2009, Prague, Czech Republic

Abstract

We report on our development of hot plastic deformation of silicon wafer for high-resolution and light-weight X-ray optics. The highly polished silicon wafer with an excellent flat surface is a promising candidate for the next generation space X-ray telescopes. Deformation accuracy and stability, especially if elastic deformation is used, are issues. The hot plastic deformation of the silicon wafer allows us 3-dimensional shaping without spring back after the deformation. As a first step of R & D, we conducted the hot plastic deformation of 4-inch silicon (111) wafers with a thickness of 300 μm by using hemispherical dies with a curvature radius of 1000 mm. The deformed wafer kept good surface quality but showed a slightly large curvature of 1030 mm. We measured the X-ray reflectivity of the deformed wafer at Al Kα 1.49 keV. For the first time, we detected the total X-ray reflection on the deformed wafer. Estimated rms surface roughness was 0-1 nm and no significant degradation from the bare silicon wafers was seen.

Citation Download Citation

Yuichiro Ezoe, Takayuki Shirata, Takaya Ohashi, Manabu Ishida, Kazuhisa Mitsuda, Kozo Fujiwara, Kohei Morishita, and Kazuo Nakajima "Development of high-resolution and light-weight x-ray optics with deformed silicon wafers", Proc. SPIE 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space, 73600B (30 April 2009); https://doi.org/10.1117/12.823932

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available