Design and fabrication of self-assembling micromirror arrays

Qingdang Li; Andreas Jäkel; Volker Viereck; Jürgen Schmid; Hartmut Hillmer

doi:10.1117/12.821686

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18 May 2009 Design and fabrication of self-assembling micromirror arrays

Qingdang Li, Andreas Jäkel, Volker Viereck, Jürgen Schmid, Hartmut Hillmer

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Proceedings Volume 7362, Smart Sensors, Actuators, and MEMS IV; 736211 (2009) https://doi.org/10.1117/12.821686
Event: SPIE Europe Microtechnologies for the New Millennium, 2009, Dresden, Germany

Abstract

We present the potential and the benefits of actuable micromirror arrays for large area applications for daylight deflection. The described micromirror arrays are intended to be implemented into windows of buildings and to provide functionalities like daylight guiding into rooms, heat regulation and glare protection. Placed between two panes of a window, these mirrors are maintenance-free and not subject to defilement. The use of micro system technology on large areas requires very low cost processes and materials, as well as a concept with a minimum of process steps and a very easy and reliable process control. We present theoretical and technological approaches and first technological results.

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Qingdang Li, Andreas Jäkel, Volker Viereck, Jürgen Schmid, and Hartmut Hillmer "Design and fabrication of self-assembling micromirror arrays", Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736211 (18 May 2009); https://doi.org/10.1117/12.821686

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