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18 May 2009 Position encoding and closed loop control of MOEMS translatory actuators
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Proceedings Volume 7362, Smart Sensors, Actuators, and MEMS IV; 736212 (2009)
Event: SPIE Europe Microtechnologies for the New Millennium, 2009, Dresden, Germany
We present a new method for detecting the accurate position of micro-electro-opto-mechanical system (MOEMS) devices, thus enabling the implementation of closed-loop controls. The ensuing control mechanism allows building robust MOEMS-based Fourier-transform infrared (FTIR) spectrometers with large mechanical amplitudes and thus good spectral resolutions. The MOEMS mirror device, a rectangular 1.65 mm² metalized plate mirror suspended on bearing springs and driven by comb-structured electrodes, is driven by a rectangular signal with a duty cycle of 50% and high voltage levels up to 140 V at a frequency near twice its mechanical resonance frequency. Out-of-plane mirror displacements of up to ±100 μm have thus been achieved. To handle the high bandwidth of the sinusoidal mirror position reference signal, which is generated by a laser reference interferometer, an analog position detection circuit is necessary. This dedicated circuit demodulates the reference signal and generates a highly accurate control signal returning the zerocrossing position of the mirror. This permits the implementation of a closed-loop control, which ensures optimally stable MOEMS mirror movement and maximal mechanical amplitude, even under varying environmental conditions. While this solution has been developed for a specific MOEMS device, the principle is widely applicable to related components.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Lenzhofer, A. Tortschanoff, A. Frank, T. Sandner, H. Schenk, M. Kraft, and A. Kenda "Position encoding and closed loop control of MOEMS translatory actuators", Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736212 (18 May 2009);


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