Identification of scanning probe microscopes sensor heads and validation of a mechanical model by a laser vibrometer

Bernd R. Arminger; Bernhard G. Zagar

doi:10.1117/12.821781

22 May 2009 Identification of scanning probe microscopes sensor heads and validation of a mechanical model by a laser vibrometer

Bernd R. Arminger, Bernhard G. Zagar

Author Affiliations +

Proceedings Volume 7378, Scanning Microscopy 2009; 73781B (2009) https://doi.org/10.1117/12.821781
Event: SPIE Scanning Microscopy, 2009, Monterey, California, United States

Abstract

In our contribution we present a technique for characterizing the piezo-driven sensor head of a scanning probe microscope (SPM) using a laser vibrometer. The experimental setup, the signal processing and some experimental results are described. Furthermore a mechanical model for the sensor head is proposed and verified by the experimental results. Finally a guidance for an online or offline correction of the position of the sensor head is presented.

Citation Download Citation

Bernd R. Arminger and Bernhard G. Zagar "Identification of scanning probe microscopes sensor heads and validation of a mechanical model by a laser vibrometer", Proc. SPIE 7378, Scanning Microscopy 2009, 73781B (22 May 2009); https://doi.org/10.1117/12.821781

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