Reduction of MRC error review time through the simplified and classified MRC result

Casper W. Lee; Jason C. Lin; Frank F. Chen

doi:10.1117/12.824274

11 May 2009 Reduction of MRC error review time through the simplified and classified MRC result

Casper W. Lee, Jason C. Lin, Frank F. Chen

Proceedings Volume 7379, Photomask and Next-Generation Lithography Mask Technology XVI; 73790X (2009) https://doi.org/10.1117/12.824274
Event: Photomask and NGL Mask Technology XVI, 2009, Yokohama, Japan

Abstract

As the Manufacturing Rule Check (MRC) error counts are very huge, it has been getting difficult to review by each point and maybe some of the design errors will be ignored. It's necessary to reduce the review error counts and improve the checking methods. The paper presents an error classification function and auto-waived mechanism for decreasing the repeated MRC errors in MRC report. In auto-waived mechanism, the report will omit the error point if it is same as previous report and the defect location output will keep all of the error points for Do Not Inspection Area (DNIR) reference. (DNIR needs customer's approval). Furthermore, it is possible to develop an auto-waived function to skip the confirmed errors which is provided by customer with a marking information table or GDS/OASIS database. Besides, this paper also presents how these errors can be grouping and reducing checking time.

Citation Download Citation

Casper W. Lee, Jason C. Lin, and Frank F. Chen "Reduction of MRC error review time through the simplified and classified MRC result", Proc. SPIE 7379, Photomask and Next-Generation Lithography Mask Technology XVI, 73790X (11 May 2009); https://doi.org/10.1117/12.824274

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