Author Affiliations +
Tsuyoshi Amano,1 Yasushi Nishiyama,1 Hiroyuki Shigemura,1 Tsuneo Terasawa,1 Osamu Suga,1 Kensuke Shiina,2 Fumio Aramaki,2 Anto Yasaka,2 Tsukasa Abe,3 Hiroshi Mohri3
1MIRAI Semiconductor Leading Edge Technologies, Inc. (Japan)
2SII NanoTechnology Inc. (Japan)
3Dai Nippon Printing Co., ltd. (Japan)