ZnO-based material and UV detector

Xin Wang; Rong Xiang; Xinglai Zhang; Jingquan Tian; Ye Li; DeLong Jiang; Qingduo Duanmu

doi:10.1117/12.833339

24 August 2009 ZnO-based material and UV detector

Xin Wang, Rong Xiang, Xinglai Zhang, Jingquan Tian, Ye Li, DeLong Jiang, Qingduo Duanmu

Proceedings Volume 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors; 738103 (2009) https://doi.org/10.1117/12.833339
Event: International Symposium on Photoelectronic Detection and Imaging 2009, 2009, Beijing, China

Abstract

ZnO is the most promising material for the application of an ultraviolet (UV) detector. However the shortage of ptype ZnO becomes the biggest blockage for fabricating ZnO-based semiconductor device. In this paper, following experiments had been done: Firstly, the zinc nitride powders were synthesized through the nitridation reaction of Zn power with NH3, and the optimized synthesis temperature was at 600°C. Next, the zinc nitride powder was fabricated into a zinc nitride sputtering target by a single pressing process. Thirdly a thin layer of zinc nitride film was formed on silicon and quartz substrate using magnetron sputtering method. Fourthly, the zinc nitride film was oxidized into p-type ZnO, and the best optimized temperature for forming p-type ZnO by oxidizing Zn₃N₂ thin film was at 500°C. Lastly, the ohmic contact for p-ZnO and ZnO based detector were fabricated. It was found Al and Ni/Au showed ohmic contact properties to n- Si and p-ZnO, respectively, and the p-ZnO/n-Si junction as a UV detector was feasible.

Citation Download Citation

Xin Wang, Rong Xiang, Xinglai Zhang, Jingquan Tian, Ye Li, DeLong Jiang, and Qingduo Duanmu "ZnO-based material and UV detector", Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 738103 (24 August 2009); https://doi.org/10.1117/12.833339

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KEYWORDS

Zinc oxide

Zinc

Sputter deposition

Thin films

Ultraviolet detectors

Quartz

Ultraviolet radiation

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