Behavior simulation for electrically actuated bow-tie shaped fixed-fixed beams based on nodal analysis method

Min Li; Qing-an Huang; Wei-hua Li

doi:10.1117/12.835121

Translator Disclaimer

24 August 2009 Behavior simulation for electrically actuated bow-tie shaped fixed-fixed beams based on nodal analysis method

Min Li, Qing-an Huang, Wei-hua Li

Author Affiliations +

Proceedings Volume 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors; 73812N (2009) https://doi.org/10.1117/12.835121
Event: International Symposium on Photoelectronic Detection and Imaging 2009, 2009, Beijing, China

Abstract

This paper reports a nodal model for the trapeziform beam element with gradual change cross-sections. Using this model, electromechanical behavior of the electrically actuated bow-tie shaped fixed-fixed beams can be simulated in a system level. The model is developed by treating the governing equations of the trapeziform beam based on the Galerkin residual method and decomposing the 4th-order partial differential equation into discrete modal ordinary differential equations. After that, the equivalent circuits and corresponding nodal model are established. In the model, the nonlinearities including mid-plane stretching and electrostatic forcing are considered. The accuracy of the developed model is verified by extensively comparing the static and dynamic analysis results with those obtained from FEA and available experiment data. The developed model is also applicable to beam-like structures with uniform cross-sections.

Citation Download Citation

Min Li, Qing-an Huang, and Wei-hua Li "Behavior simulation for electrically actuated bow-tie shaped fixed-fixed beams based on nodal analysis method", Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 73812N (24 August 2009); https://doi.org/10.1117/12.835121

ACCESS THE FULL ARTICLE