Multiwavelength non-incremental laser Doppler distance sensor with phase coding for vibration measurements

P. Günther; T. Pfister; J. Czarske

doi:10.1117/12.870756

13 September 2010 Multiwavelength non-incremental laser Doppler distance sensor with phase coding for vibration measurements

P. Günther, T. Pfister, J. Czarske

Author Affiliations +

Proceedings Volume 7387, Speckle 2010: Optical Metrology; 738708 (2010) https://doi.org/10.1117/12.870756
Event: Speckle 2010, 2010, Florianapolis, Brazil

Abstract

In this article we present a novel optical sensor allowing simultaneous measurements of axial displacement and tangential velocity of moving rough solid state objects. The laser Doppler distance sensor with phase coding (P-LDDS) features multiple interference fringe systems which are superposed slightly tilted. The axial displacement of fast laterally moving rough solid state surfaces as well as of purely axial moving objects is determined via phase evaluation. Within a measurement range of 200 μm, the measured maximum systematic displacement error at a laterally moving rough solid state object is 1.4 μm and the displacement resolution is 240 nm. In contrast to conventional measurement techniques, such as triangulation, the displacement uncertainty is independent of the lateral object velocity. This unique feature can be utilized for precise displacement and vibration measurements of high speed objects.

Citation Download Citation

P. Günther, T. Pfister, and J. Czarske "Multiwavelength non-incremental laser Doppler distance sensor with phase coding for vibration measurements", Proc. SPIE 7387, Speckle 2010: Optical Metrology, 738708 (13 September 2010); https://doi.org/10.1117/12.870756

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