Resolution enhanced technologies in digital holography

G. Pedrini; D. Hopp; U. Gopinathan; W. Osten

doi:10.1117/12.849634

31 December 2009 Resolution enhanced technologies in digital holography

G. Pedrini, D. Hopp, U. Gopinathan, W. Osten

Proceedings Volume 7388, Ninth International Conference on Correlation Optics; 73880K (2009) https://doi.org/10.1117/12.849634
Event: Correlation Optics 2009, 2009, Chernivsti, Ukraine

Abstract

We present different systems based on digital holography suitable for the investigation of microscopic objects. A deep UV laser source (193 nm) and high numerical aperture geometry have been used to increase the resolution of the reconstructed amplitude and phase. Furthermore we show how digital holographic interferometry can be used to measure the deformation of microsystems down to the nanometer scale.

Citation Download Citation

G. Pedrini, D. Hopp, U. Gopinathan, and W. Osten "Resolution enhanced technologies in digital holography", Proc. SPIE 7388, Ninth International Conference on Correlation Optics, 73880K (31 December 2009); https://doi.org/10.1117/12.849634

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