New approach to workpiece localization in subaperture stitching interferometric testing

Pengfei Zhang; Hong Zhao; Tao Jiang; Jinjun Li; Xiang Zhou; Lu Zhang

doi:10.1117/12.824663

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17 June 2009 New approach to workpiece localization in subaperture stitching interferometric testing

Pengfei Zhang, Hong Zhao, Tao Jiang, Jinjun Li, Xiang Zhou, Lu Zhang

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Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 738927 (2009) https://doi.org/10.1117/12.824663
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

Large aperture optics have been used more and more widely in modern optical system. But the testing of its surface quality is very difficult. The circular sub-aperture stitching (CSAS) testing method can effectively extend the interferometer's vertical dynamic range and enhance its lateral resolution, so it may be the best solution to the testing of large aperture optics. Actually, the CSAS method can be viewed as a special workpiece localization problem. If the pose data of all sub-apertures obtained are accurate enough, the sub-aperture data can be directly stitched together to create a map of the full aperture. In this paper, a CSAS system will be introduced. Its motion mechanism has seven degrees of freedom. This brings some trouble for obtaining the optics' accurate pose data along with the motion error's accumulation. So a stereovision system is added. By exploiting appropriate scheme and algorithm, it can directly give out the optics' accurate pose data. This provides an effective initial value for the stitching algorithm. Finally, a 150mm flat and a 100mm convex sphere is tested using this method, and the experimental results is given to show the effect of this method and the efficiency of the CSAS system.

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Pengfei Zhang, Hong Zhao, Tao Jiang, Jinjun Li, Xiang Zhou, and Lu Zhang "New approach to workpiece localization in subaperture stitching interferometric testing", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 738927 (17 June 2009); https://doi.org/10.1117/12.824663

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