Inspection of aspherical lenses by wavefront analysis

Ufuk Ceyhan; Thomas Henning; Friedrich Fleischmann; Dietmar Knipp

doi:10.1117/12.834224

17 June 2009 Inspection of aspherical lenses by wavefront analysis

Ufuk Ceyhan, Thomas Henning, Friedrich Fleischmann, Dietmar Knipp

Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 73893L (2009) https://doi.org/10.1117/12.834224
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

A new approach for quantifying the optical aberrations of aspherical lenses is presented. A measurement setup is developed which measures the local wavefront slopes using a motorized scanning system. The simulation results of the setup are presented in order to validate the potential of the measurement principle. Experimental results by the measurement of a commercial aspherical lens verify the theoretical investigations. Dynamic range of the measurable Zernike coefficients and Peak to Valley (P-V) wavefronts are quantified. Focal length of the aspheric lens under test is calculated from the Zernike coefficients which are determined by performing a nonlinear regression analysis for the measured slopes and the partial derivatives of the wavefront. Furthermore, 3rd order spherical aberration term of the wavefront is analyzed dependent on different wavelengths.

Citation Download Citation

Ufuk Ceyhan, Thomas Henning, Friedrich Fleischmann, and Dietmar Knipp "Inspection of aspherical lenses by wavefront analysis", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73893L (17 June 2009); https://doi.org/10.1117/12.834224

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