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21 August 2009 Label-free biosensors on silicon-on-insulator optical chips
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Proceedings Volume 7397, Biosensing II; 739710 (2009) https://doi.org/10.1117/12.825648
Event: SPIE NanoScience + Engineering, 2009, San Diego, California, United States
Abstract
To come up to the demand for extremely sensitive biosensors for parallel real-time bioanalyses, we present several configurations of label-free biosensors on Silicon-on-Insulator (SOI) optical chips. We discuss results on microring resonators with a non-fouling polymer coating, increased sensitivity with slotted wire resonators and the design and fabrication of an integrated surface plasmon resonance interferometer. The high refractive index contrast of SOI offers submicron-size features with high quality for dense integration, high sensitivity and detection with very low analyte volumes. The fabrication method, 193nm deep-UV lithography, allows for mass production of cheap disposable biochips.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Katrien De Vos, Peter Debackere, Tom Claes, Jordi Girones, Wout De Cort, Etienne Schacht, Roel G. Baets, and Peter Bienstman "Label-free biosensors on silicon-on-insulator optical chips", Proc. SPIE 7397, Biosensing II, 739710 (21 August 2009); https://doi.org/10.1117/12.825648
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