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21 August 2009 Fabrication and characterization of polymer based spatial light modulators
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We report on device properties of tunable spatial light modulators for high-resolution optical applications by a novel fabrication process. Thin polydimethylsiloxane (PDMS) films (4ìm-13ìm) were sandwiched between a flexible gold film(50nm) and a rigid substrate with a comb-like electrode either by compression molding or spin coating. By applying voltage between the upper gold film and underlying electrode, the initial plane PDMS surface changes into a form of grating. Far-field scattering pattern with high order light components was observed by illumination at the continuously reflective gold film with laser beam. Characterization was done by measuring the grating profile of the PDMS and the response time. The PDMS deformation was demonstrated to increase with driving voltage. The deformation for 6ìm thick PDMS is measured around 100nm when driving voltage is applied as 230V. Modeling and simulation of the modulator electro-mechanical behavior was done for varies structure design. The simulation results showed fair agreement with the experimental results. The response time, which defines how fast the PDMS response to the applied voltage, was measured as a function of the driving voltage. The measured rise time is around 1 micorseconds and the fall time is around 0.2 microseconds.
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G. Ouyang, K. Wang, M. N. Akram, and X. Chen "Fabrication and characterization of polymer based spatial light modulators", Proc. SPIE 7426, Optical Manufacturing and Testing VIII, 742604 (21 August 2009);


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