Increased UV transmission by improving the manufacturing processes for FS

Jessica DeGroote-Nelson; Tobias Nitzshe; Daniel E. Savage; Jonathan T. Watson; Donald K. Henry; Andrew A. Haefner; Robert A. Wiederhold

doi:10.1117/12.825377

21 August 2009 Increased UV transmission by improving the manufacturing processes for FS

Jessica DeGroote-Nelson, Tobias Nitzshe, Daniel E. Savage, Jonathan T. Watson, Donald K. Henry, Andrew A. Haefner, Robert A. Wiederhold

Author Affiliations +

Proceedings Volume 7426, Optical Manufacturing and Testing VIII; 742609 (2009) https://doi.org/10.1117/12.825377
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

Optical designers have been designing ultraviolet (UV) systems at wavelengths in the UV region for many years. With increasing demand for deep UV applications, special considerations that are not applicable to traditional visible optics must be taken to produce the optics. Specifically as the wavelength of incident light decreases, the importance of very smooth surfaces increases. The intent of this project is to increase the performance of UV optics in a four-phase project. The first phase consists of characterizing sub-surface damage using destructive methods to enable process control, the second phase (presented here) focuses on polishing methods, the third phase will include cleaning and possible etching protocols and the fourth phase will be improving thin film coating performance.

Citation Download Citation

Jessica DeGroote-Nelson, Tobias Nitzshe, Daniel E. Savage, Jonathan T. Watson, Donald K. Henry, Andrew A. Haefner, and Robert A. Wiederhold "Increased UV transmission by improving the manufacturing processes for FS", Proc. SPIE 7426, Optical Manufacturing and Testing VIII, 742609 (21 August 2009); https://doi.org/10.1117/12.825377

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