Simulation and analysis of the polishing process for aspheres

Andreas Kelm; Manuel Hänle; Rainer Boerret; Stefan Sinzinger

doi:10.1117/12.825067

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21 August 2009 Simulation and analysis of the polishing process for aspheres

Andreas Kelm, Manuel Hänle, Rainer Boerret, Stefan Sinzinger

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Proceedings Volume 7426, Optical Manufacturing and Testing VIII; 74260F (2009) https://doi.org/10.1117/12.825067
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

For the Computer Controlled Polishing (CCP) process of aspheres and freeform shapes different kind of subaperture tools can be used. The selection of the best tool out of a wide range of possible and available tools is today based on the experience of the skilled operator. If the optical part is finished with sufficient quality in a reasonable time, the working procedure is fixed. Another approach is to put the tool choice on a scientific base, using a simulation to generate the wear function and a Power Spectral Density (PSD) analysis to describe the residual shape deviations. Based only on theoretical tool data and the geometric shape of the tool, the final result of the shape correction could be calculated and transferred to a NC machine code for various polishing machines.

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Andreas Kelm, Manuel Hänle, Rainer Boerret, and Stefan Sinzinger "Simulation and analysis of the polishing process for aspheres", Proc. SPIE 7426, Optical Manufacturing and Testing VIII, 74260F (21 August 2009); https://doi.org/10.1117/12.825067

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