3D measurement method based on wavelet transform by using SEM

Yasuhiko Arai; M. Ando; S. Yokozeki

doi:10.1117/12.828518

10 September 2009 3D measurement method based on wavelet transform by using SEM

Yasuhiko Arai, M. Ando, S. Yokozeki

Proceedings Volume 7432, Optical Inspection and Metrology for Non-Optics Industries; 743207 (2009) https://doi.org/10.1117/12.828518
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

The three-dimensional measurement method by SEM has already been proposed by using the principle of shadow moiré. In this method, there are some troubles in order to perform a high-resolution analysis. A new method based on the principle of projection moiré is discussed to solve the troubles. In this paper, the mechanism of producing some shadows of the grid on the surface of the object by back scattering electron beam is discussed. Fringe image as the shadow of grating is analyzed by the Wavelet transform. 3-D precise measurement can be realized by using the phenomenon of shadows of grid by electron. The error analysis of the proposed method is also performed. Furthermore, a three dimensional structure of the head of a hard disk is measured by the system using the grating of which pitch is 4 μm. From comparison with AFM, it is confirmed that the proposed method has high-resolution power.

Citation Download Citation

Yasuhiko Arai, M. Ando, and S. Yokozeki "3D measurement method based on wavelet transform by using SEM", Proc. SPIE 7432, Optical Inspection and Metrology for Non-Optics Industries, 743207 (10 September 2009); https://doi.org/10.1117/12.828518

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