Three-dimensional profilometry based on focus method by projecting LC grating pattern

Yukitoshi Otani; Fumio Kobayashi; Yasuhiro Mizutani; Toru Yoshizawa

doi:10.1117/12.827028

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10 September 2009 Three-dimensional profilometry based on focus method by projecting LC grating pattern

Yukitoshi Otani, Fumio Kobayashi, Yasuhiro Mizutani, Toru Yoshizawa

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Proceedings Volume 7432, Optical Inspection and Metrology for Non-Optics Industries; 743210 (2009) https://doi.org/10.1117/12.827028
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

This paper describes a 3D surface profile measurement based on focus method by an optical sectioning. The optical system is employed uniaxial condition of projection and observation axis. The contrast of projected sinusoidal pattern onto the sample is approximated the Gauss distribution along the distance. The highest contrast indicates at the focused plane. It is possible to analyze the contrast distribution by a grating projected method using a liquid crystal grating. A phase-shifting method is applied to the contrast analysis. The liquid crystal grating is powerful tool to make arbitrary intensity and frequency distribution. Surface profiles of mechanical parts were measured to demonstrate for this method.

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Yukitoshi Otani, Fumio Kobayashi, Yasuhiro Mizutani, and Toru Yoshizawa "Three-dimensional profilometry based on focus method by projecting LC grating pattern", Proc. SPIE 7432, Optical Inspection and Metrology for Non-Optics Industries, 743210 (10 September 2009); https://doi.org/10.1117/12.827028

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