Parallel processing for pitch splitting decomposition

Levi Barnes; Yong Li; David Wadkins; Steve Biederman; Alex Miloslavsky; Chris Cork

doi:10.1117/12.831396

30 September 2009 Parallel processing for pitch splitting decomposition

Levi Barnes, Yong Li, David Wadkins, Steve Biederman, Alex Miloslavsky, Chris Cork

Proceedings Volume 7488, Photomask Technology 2009; 74882L (2009) https://doi.org/10.1117/12.831396
Event: SPIE Photomask Technology, 2009, Monterey, California, United States

Abstract

Decomposition of an input pattern in preparation for a double patterning process is an inherently global problem in which the influence of a local decomposition decision can be felt across an entire pattern. In spite of this, a large portion of the work can be massively distributed. Here, we discuss the advantages of geometric distribution for polygon operations with limited range of influence. Further, we have found that even the naturally global "coloring" step can, in large part, be handled in a geometrically local manner. In some practical cases, up to 70% of the work can be distributed geometrically. We also describe the methods for partitioning the problem into local pieces and present scaling data up to 100 CPUs. These techniques reduce DPT decomposition runtime by orders of magnitude.

Citation Download Citation

Levi Barnes, Yong Li, David Wadkins, Steve Biederman, Alex Miloslavsky, and Chris Cork "Parallel processing for pitch splitting decomposition", Proc. SPIE 7488, Photomask Technology 2009, 74882L (30 September 2009); https://doi.org/10.1117/12.831396

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