Model-based hints for litho-hotspots repair

Yue Yang; Marko Chew; Toshikazu Endo; Mark Simmons

doi:10.1117/12.829726

23 September 2009 Model-based hints for litho-hotspots repair

Yue Yang, Marko Chew, Toshikazu Endo, Mark Simmons

Proceedings Volume 7488, Photomask Technology 2009; 74883O (2009) https://doi.org/10.1117/12.829726
Event: SPIE Photomask Technology, 2009, Monterey, California, United States

Abstract

A litho hotspot repair hints requires the specifications of how layout edges should be modified. Identifying how layout edges not directly touching the hotspot region is challenging to encode in a rule set. We propose an approach using models called Partition Response Surface Models (pRSM) to estimate the contours changes due to design layout modifications. In this paper we present details of litho hotspot repair hint engine which uses the pRSM models to compute the shape changes amount to resolve a litho hotspot and which can accept constraints from both design considerations or design rule considerations.

Citation Download Citation

Yue Yang, Marko Chew, Toshikazu Endo, and Mark Simmons "Model-based hints for litho-hotspots repair", Proc. SPIE 7488, Photomask Technology 2009, 74883O (23 September 2009); https://doi.org/10.1117/12.829726

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